Selection principle of vacuum material in vacuum pump

Requirements for the shake of the vacuum vessel housing and internal parts materials 1 The vacuum pump has sufficient mechanical strength and rigidity to ensure that the housing can withstand the atmospheric pressure at room temperature and baking temperature, and in the heating and baking (especially for the ultra-high vacuum system ) No distortion occurs.

2 good airtightness. To maintain a good vacuum environment, the wall material should not have porous structures, cracks, or other defects that cause leakage. There is a lower rate of permeation and outgassing.

3 The saturated vapor pressure at the operating temperature and baking temperature should be sufficiently low (especially important for ultra-high vacuum systems).

4 good chemical stability. It is not easy to oxidize and corrode and does not react chemically with the working medium in the vacuum pump and the bleed air in the process.

5 good thermal stability. Maintains good vacuum and mechanical properties over the operating temperature range (high and low temperatures) of the system.

6 In the working vacuum and working temperature, the internal components of the vacuum vessel should maintain good working performance and meet the requirements of the working process.

7 has good ductility, mechanical processing performance and welding performance, easy to process into a complex shape of the shell.